Quality standard:
Molecular formula: WF6 Molecular weight: 297.8 | |
Item |
Index |
tungsten hexafluoride (WF6) ≥ |
99.999 |
nitrogen gas (N2) /ppmv < |
1 |
oxygen+argon (O2+Ar) /ppmv < |
0.5 |
carbon monoxide (CO) /ppmv< |
0.5 |
carbon dioxide (CO2) /ppmv< |
0.5 |
carbon tetrafluoride (CF4) /ppmv< |
0.5 |
nitrogen trifluoride (NF3) /ppmv < |
0.5 |
sulfur hexafluoride (SF6) /ppmv< |
0.5 |
silicon fluoride (SiF4) /ppmv < |
0.5 |
ydrofluoric acid (HF) /ppmv< |
5 |
alumnium (Al) /ppmv < |
0.2 |
calcium (Ca) /ppmv< |
0.01 |
carbon monoxide (CO) /ppmv< |
0.01 |
chromium (Cr) /ppmv < |
0.02 |
copper (Cu) /ppmv < |
0.01 |
iron (Fe) /ppmv < |
0.02 |
potassium (K) /ppmv< |
0.15 |
magnesium (Mg) /ppmv< |
0.01 |
manganese (Mn) /ppmv< |
0.1 |
molybdenum (Mo) /ppmv< |
0.5 |
sodium (Na) /ppmv < |
0.015 |
nickel (Ni) /ppmv< |
0.1 |
lead (Pb) /ppmv < |
0.02 |
thorium (Th) /ppmv< |
0.1 |
uranium (U) /ppmv < |
0.05 |
zinc (Zn) /ppmv < |
0.05 |
Character:
Colorless gas or light yellow liquid or solid; melting point: 2.3℃; boling point: 17.5℃
To use:
As chemical evaporation of tungsten; as fluorinating agent
Storage:
Should be preserved in cool, dry and ventilated warehouse; separate with fire and heat source; in sealed container; separate with metal powder
Storage:
steel gas cylinder
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